Chipworks Real Chips: December 2012
Paper Title (use style: paper title)
Deep Trench Capacitor Based On-Chip Switched Capacitor Voltage Regulators for Microprocessor Power Delivery
Figure 9 from High-Density Embedded Deep Trench Capacitors in Silicon With Enhanced Breakdown Voltage | Semantic Scholar
TSMC Deep Trench Capacitor (DTC) - System Plus Consulting
Figure 6 from Deep Trench capacitor drive of a 3.3 GHz unreleased Si MEMS resonator | Semantic Scholar
5.4.3 Generation Sequences
Paper Title (use style: paper title)
BALD Engineering - Born in Finland, Born to ALD: Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications
TSMC Digs Trenches In Search Of Higher Performance – WikiChip Fuse
Massive On-Die Capacitor for Integrated Circuits
Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration | Semantic Scholar
Picosun's ALD technology enables record capacitance density 1uF/mm2 by its 3D silicon-integrated microcapacitors
Infineon Achieves Breakthrough in DRAM Trench Technology - Demonstrates Scalability to Process Structures of 70 Nanometer - Infineon Technologies
Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications | Semantic Scholar
19.5 Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration
19.5 Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration
IEDM 2019 (Part 2) 3D_Packaging Innovation and Memory Technology (Ferroelectrics) – The Media News
TSMC Deep Trench Capacitor (DTC) - System Plus Consulting
A deep trench super-junction LDMOS with double charge compensation layer
Through Silicon Capacitor co-integrated with TSVs on silicon interposer - ScienceDirect
SEM images of the trench capacitors: (a) crosssection view and (b)... | Download Scientific Diagram
Types of IC capacitors available to integrate on chips - Mis Circuitos
Silicon Capacitors with extremely high stability and reliability ideal for high temperature applications
memory - Calculation of capacitor of deep trench DRAM - Electrical Engineering Stack Exchange
Ultrahigh-density (> 0.4 µF/mm2) trench capacitors in silicon
